22FDX? Device Optimization for mmW PA

ESSDERC 2023 - IEEE 53rd European Solid-State Device Research Conference (ESSDERC)(2023)

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摘要
New extended drain field effect transistors, EDNFET and EDPWNFET, with technology and layout optimization for mmW PA on 22FDX technology is carefully carried out in this work. Optimization through work-function engineering, gate resistance routing at PA array, and drain extension through multiple contact to poly pitch (CPP) results in 20% reliability enhancement while not sacrifice on-resistance (Ron). 2 Stage PA consist of optimized device as output stage shows a 2x improvement in output power (Pout) reaching 23dBm as well as 3% PAE enhancement at 28Ghz. To our knowledge, this is the best result we see on the 22FDX((R)) technology at 28Ghz
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关键词
Device, EDNFET, mmW PA, 22FDX
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