Unique Enhancement of the Whispering Gallery Mode in Hexagonal Microdisk Resonator Array with Embedded Ge Quantum Dots on Si

The coupling between the quantum dots (QDs) and silicon-based microdisk resonator facilitates enhancing the light-matter interaction for the novel silicon-based light source. However, the typical circular microdisks embedded with Ge QDs still have several issues, such as wide spectral bandwidth, difficult mode selection, and low waveguide coupling efficiency. Here, by a promising structural modification based on the mature nanosphere lithography (NSL), we fabricate a large area hexagonal microdisk array embedded with Ge QDs in order to enhance the near-infrared light emissions by a desired whispering gallery modes (WGMs). By comparing circular microdisks with comparable sizes, we found the unique photoluminescence enhancement effect of hexagonal microdisks for certain modes. We have confirmed the WGMs which are supported by the microdisks and the well-correlated polarized modes for each resonant peak observed in experiments through the Finite Difference Time Domain (FDTD) simulation. Furthermore, the unique enhancement of the TE5,1 mode in the hexagonal microdisk is comparatively analyzed through the simulation of optical field distribution in the cavity. The larger enhanced region of the optical field contains more effectively coupled QDs, which significantly enhances the PL intensity of Ge QDs. Our findings offer a promising strategy toward a distinctive optical cavity that enables promising mode manipulation and enhancement effects for large-scale, cost-effective photonic devices.