Optimization of Electron-Beam Evaporation Process Parameters for ZrN Thin Films by Plasma Treatment and Taguchi Method
PLASMA（2023）
Key words
zirconium nitride,electron-beam evaporation,ion-assisted deposition,optimization parameters
AI Read Science
Must-Reading Tree
Example
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined