Performance Analysis of MoTe 2 /MoSe 2 and MoTe 2 /WSe 2 Heterostructure Double-Gate MOSFET

Journal of Electronic Materials(2023)

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摘要
In this work, the performance of a heterostructure molybdenum ditelluride (MoTe 2 /MoSe 2 and MoTe 2 /WSe 2 ) double-gate (DG) metal–oxide–semiconductor field-effect transistor (MOSFET) was investigated using a hybrid methodology. The device characteristics were obtained using 2H-type bilayer MoTe 2 and a heterobilayer of MoTe 2 /MoSe 2 and MoTe 2 /WSe 2 as channel material in a DG MOSFET. The methodology uses both the QuantumWise Atomistix ToolKit (ATK) and Sentaurus TCAD (technology computer-aided design) tool to simulate the device characteristics. First, density functional theory was used to simulate the electrical parameters of bilayer 2H-MoTe 2 , heterobilayer MoTe 2 /MoSe 2 , and MoTe 2 /WSe 2 . The parameters (bandgap and effective mass, mobility, etc.) obtained using the atomistic simulator tool were exported into Sentaurus TCAD to simulate the drain current characteristics, such as on-current ( I on ), I on / I off ratio, subthreshold swing, and threshold voltage. The noise performance of the devices was also studied for the heterostructure DG MOSFET using impedance field method and compared with its bilayer MoTe 2 counterpart values. Noise parameters such as noise power spectral density ( S ID ) and noise figure as a function of both frequency and bias were also simulated, and noise components such as generation–recombination (G-R) noise, flicker noise, and white noise were obtained.
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关键词
Heterostructure MoTe2,noise,TCAD,DFT
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