Bipolar charge transport and contact phenomena in Al2O3

Yu.N. Novikov,A.A. Gismatulin, B. Hallac, Y. Roizin, V.A. Gritsenko

Thin Solid Films（2023）

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摘要

•The Al2O3 conductivity is limited not only by bulk, but by boundary conditions.•Electrons and holes contribute to the Al2O3 conductivity.•For the Al2O3 charge transport, the multiphonon trap ionization mechanism is used.

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关键词

Alumina,Atomic layer deposition,Traps,Charge transport,Multiphonon ionization mechanism

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