Enhancing electrical performance and stability of nanometer-thin ITO transistors via thermally oxidized alumina passivation layer
AIP ADVANCES(2023)
摘要
In this study, we investigated the utilization of alumina (AlOx), formed through the oxidation of thermally evaporated aluminum, as a passivation layer for nanometer-thin indium-tin-oxide (ITO) transistors. The ITO transistors passivated with thermally oxidized AlOx passivation exhibited remarkable electrical properties, with an average field-effect mobility of 241 cm(2)/Vs, significantly higher than the 40 cm(2)/Vs observed for devices without the AlOx passivation layer. Moreover, the passivated transistors maintained a high on/off current ratio at 10(8) level. In addition, the passivated transistors demonstrated improved stability, with a decrease in the threshold voltage (V-th) shift under negative bias stress testing conducted over 3600 seconds. The ITO transistors also displayed better air-ambient stability compared to transistors without the AlOx passivation layer. These results demonstrate the potential application of alumina passivation in nanometer-thin ITO field-effect transistors.
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