SiGe-based Nanowire HBT for THz Applications
2023 7TH IEEE ELECTRON DEVICES TECHNOLOGY & MANUFACTURING CONFERENCE, EDTM(2023)
摘要
This paper proposes a novel 3D nanowire (NW) based SiGe HBT for the first time. The overall purpose is to estimate the RF performance of an NW device based on the state-of-the-art B55 technology from STMicroelectronics. The challenges associated with the device fabrication and corresponding solutions are briefed. The proposed NW-HBT array predicts an f(MAX) (> 900 GHz) that is more than twice of that obtainable from the corresponding bulk SiGe HBT.
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关键词
SiGe HBT, Nanowire, f(MAX)
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