Advanced Compact Modeling for Transistor Aging: Trap-based Approaches and Mixed-mode Coupling

2023 7TH IEEE ELECTRON DEVICES TECHNOLOGY & MANUFACTURING CONFERENCE, EDTM(2023)

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摘要
In this paper, the recent advances of our studies on the compact aging modeling of bias temperature instability (BTI), hot carrier degradation (HCD) and mixed-mode transistor reliability are presented from trap-based approaches. Origins of BTI with contributions from different types of traps are identified from advanced characterization techniques. An open-source BTI model, with the industry-standard model interface OMI and the capability of capturing both degradation and recovery, has been developed for SPICE simulation and Design-Technology Co-optimization (DTCO). Three types of traps also have been identified from experiments in HCD, and a unified model has been proposed which can accurately predict HCD in full Vgs/Vds bias. Finally, the mixed-mode reliability of HCD-BTI coupling, through self-heating or under off-state stress, is discussed.
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关键词
FinFET,BTI,HCD,aging model,SPICE
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