A Study on the Output Performance of Solid-solid Triboelectric Energy Harvesting Depending on the Surface Morphology and Thickness of AAO

Due to the increasing demand for wearable devices and miniaturization of various electronic devices, the trend of nanofabrication in IT devices is underway. In order to overcome the limitations of battery size and capacity, there has been a lot of research interest in energy harvesting technology, also known as triboelectric nanogenerator. AAO(Anodic Aluminum oxide) coated with fluoride is a structure that includes an anode layer with high properties in the triboelectric series, an dielectric layer that helps transfer the triboelectrically generated charges to the electrode without loss, and the electrode. For these reasons, AAO has been a lot of research on its application to frictional energy harvesting nanogenerators. In this work, we analyzed the correlation of AAO between the surface morphology and thickness of the insulating layer by utilizing aluminum oxide, which is advantageous for the application of triboelectric nanogenerators, and adjusting the thickness of the insulating layer.