Impact of Nitridation on Bias Temperature Instability and Hard Breakdown Characteristics of SiON MOSFETs.
MICROMACHINES（2023）
Key words
bias temperature instability,hard breakdown,nitridation,nitrogen content,nitrided oxide,ramped voltages stress,SiON,SiO2,transistor lifetime,defects
AI Read Science
Must-Reading Tree
Example
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined