Characterization of Residual Stress in SOI Wafers by Using MEMS Cantilever Beams.Haotian Yang,Min Liu,Yingmin Zhu,Weidong Wang,Xianming Qin,Lilong He,Kyle JiangMICROMACHINES（2023）引用 4|浏览15关键词SOI,residual stress,cantilever beam,MEMS,characterizationAI 理解论文溯源树样例生成溯源树，研究论文发展脉络Chat Paper正在生成论文摘要
