Fabrication and Soft-X-Ray and EUV Range Testing of Au- and Multilayer Mo/Si-Coated Diffraction Gratings with High-Order Blaze
Bulletin of the Lebedev Physics Institute（2023）
Key words
blazed diffraction grating,wet Si etching,triangular groove profile,atomic force microscopy,scanning electron microscopy,diffraction efficiency,extreme ultraviolet and soft X-ray ranges
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