Ag Thickness and Substrate Effects on Microstructural and Optoelectronic Properties of AZO/Ag/AZO Multilayer Structures Deposited by Confocal RF Magnetron Sputtering
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING（2023）
关键词
AZO/Ag/AZO multilayer,Confocal sputtering,Substrate type,Microstructure,Optoelectronic properties,Photoluminescence
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