Chemical Mass Transfer of Indium Oxide and In 2 O 3 −Me x O y Complex Systems

An extensive study of the chemical mass transfer of indium oxide and In 2 O 3 −Me x O y systems is performed. The efficiency of C, CO, H 2 , Se 2 , S 2 , In 2 S, In 2 Se, HI, HBr, HCl, InI 3 , InBr 3 , InCl 3 , I 2 , Br 2 and Cl 2 as transport agents for the growth of In 2 O 3 crystals by means of the chemical vapor transport (CVT) in the sealed growth chambers is estimated. The CVT system composition and mass transfer are evaluated in the wide temperature range (627−1227°С). It is shown that among the examined substances, Cl 2 is the optimal transport agent for the growth of In 2 O 3 crystals with a minimum growth nucleus density. The compositions of Me x O y −In 2 O 3 −Cl 2 CVT systems were calculated for oxides (Me x O y ) of all non-radioactive metals of the periodic table, taking into account various types of chloride species. The effect of temperature (627−1227°С) on the total pressure and mass transfer rate of doping species (MeCl n ) were investigated. Doping of In 2 O 3 by some metal oxides was predicted to be promising and some calculation results are confirmed experimentally.