Micro- and Nano-Raman Spectroscopy Characterization of Exfoliated Graphene with Helium-Ion Microscope Patterned Line Defects

Material & PRIME;s patterned modifications are crucial for device fabrication, and their evolution from the micro- to the nanoscale depends on the development of modification and characterization techniques. Herein, a graphene sample cut by a He-ion beam is characterized using Raman spectroscopy. What can be obtained from micro-Raman spectroscopy as compared to nano-Raman spectroscopy is analyzed, the latter implemented in the tip-enhanced Raman spectroscopy (TERS) configuration. Local sputtering, inhomogeneous distributions of defects, strain and doping are only observed in the higher-resolution nano-Raman-mode characterization.