Fully Integrated Silicon Photonic Circuit technology with SiN passives, Ge photodetectors and III- V/Si SOAs

Martin Peyrou,Jason Mak,Torrey Thiessen,Kevin Froberger,Florian Denis-Le Coarer,Zheng Yong,Laurent Milord,Marylise Marchenay, Frederic Mazur,Yannis Le Guennec,Christophe Jany,Joyce K. S. Poon,Sylvie Menezo

2022 EUROPEAN CONFERENCE ON OPTICAL COMMUNICATION (ECOC)（2022）

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摘要

We present for the first time a fully integrated silicon photonic circuit technology. III-V on Si amplifiers are monolithically integrated at the backside of advanced Silicon photonic wafers comprising SiN passive devices, Si based phase shifters and Ge waveguide-photodetectors. (C) 2022 The Author(s)

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关键词

ge photodetectors,silicon

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