Fully Integrated Silicon Photonic Circuit technology with SiN passives, Ge photodetectors and III- V/Si SOAs
2022 EUROPEAN CONFERENCE ON OPTICAL COMMUNICATION (ECOC)(2022)
摘要
We present for the first time a fully integrated silicon photonic circuit technology. III-V on Si amplifiers are monolithically integrated at the backside of advanced Silicon photonic wafers comprising SiN passive devices, Si based phase shifters and Ge waveguide-photodetectors. (C) 2022 The Author(s)
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关键词
ge photodetectors,silicon
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