A seesaw-type MEMS switch with Pt and Ru contacts

i.v.uvarov@bk.ru Abstract. Microelectromechanical systems (MEMS) switches have outstanding working characteristics and a wide range of possible applications, but suffer from the lack of reliability. The main reason of failure is the degradation of metal contacts, which increases the on -resistance or leads to stiction. A proper choice of the contact material may solve the problem. In this work, the performance of Pt-Pt and Ru-Ru contacts is investigated. The study is performed using a recently proposed stiction-protected MEMS switch. The contact resistance and lifecycle in the cold switching regime are measured and compared.