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Optical Properties of Black Silicon Structures ALD-coated with Al2O3.

David Schmelz,Kristin Gerold,Thomas Kaesebier,Natali Sergeev,Adriana Szeghalmi,Uwe D. Zeitner

NANOTECHNOLOGY（2023）

Cited 7|Views7
Key words
black silicon,Al2O3,atomic layer deposition,antireflective structures,light trapping
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