Performance improvement of MOCVD grown ZnGa2O4 based NO gas sensors using plasma surface treatment

Ting-Yu Chang,Anoop Kumar Singh,Jhih-Hong Shao,Chiung-Yi Huang,Jia-Min Shieh,Dong-Sing Wuu,Po-Liang Liu,Ray-Hua Horng

Applied Surface Science（2023）

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摘要

•ZnGa2O4 has shown promising results as a material for NO gas sensing applications.•Plasma surface treatment improves the performance of ZnGa2O4 based NO gas sensors.•The limit of detection is found to be 2.4 ppb.•ZnGa2O4 gas sensor possess highly selectivity for NO gas.•Ar surface modification techniques can enhance the performance of gas sensors.

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关键词

Gas sensor,Nitric oxide,Plasma treatment,Surface morphology,ZnGa2O4 epilayer

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