Wafer-level Vacuum Packaged Translatory MEMS Mirror with Large Stroke for Compact NIR-FT SpectrometersThilo Sandner,Eric Gaumont,Thomas Graßhoff, Andreas Rieck,Tobias Seifert,Gerald Auböck,Jan Grahmannopenalex（2023）引用 0|浏览3AI 理解论文溯源树样例生成溯源树，研究论文发展脉络Chat Paper正在生成论文摘要
