Investigation of Electrochromic, Combinatorial TiO2-SnO2 Mixed Layers by Spectroscopic Ellipsometry Using Different Optical Models

We determined the optimal composition of reactive magnetron-sputtered mixed layers of Titanium oxide and Tin oxide (TiO2-SnO2) for electrochromic purposes. We determined and mapped the composition and optical parameters using Spectroscopic Ellipsometry (SE). Ti and Sn targets were put separately from each other, and the Si-wafers on a glass substrate (30 cm x 30 cm) were moved under the two separated targets (Ti and Sn) in a reactive Argon-Oxygen (Ar-O-2) gas mixture. Different optical models, such as the Bruggeman Effective Medium Approximation (BEMA) or the 2-Tauc-Lorentz multiple oscillator model (2T-L), were used to obtain the thickness and composition maps of the sample. Scanning Electron Microscopy (SEM) with Energy-Dispersive X-ray Spectroscopy (EDS) has been used to check the SE results. The performance of diverse optical models has been compared. We show that in the case of molecular-level mixed layers, 2T-L is better than EMA. The electrochromic effectiveness (the change of light absorption for the same electric charge) of mixed metal oxides (TiO2-SnO2) that are deposited by reactive sputtering has been mapped too.