AlGaN films grown by reactive magnetron sputtering on glass substrates with different Al content
Surfaces and Interfaces(2023)
摘要
•Sputtering technique as a cost-effective process to obtain AlGaN films.•Different Al content in AlGaN films using reactive magnetron sputtering system.•Fine control of Al content through target power ratio.•Homogeneous phase and c-axis oriented AlGaN films.•Bandgap variation with composition in AlGaN films.
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关键词
GaN,AlGaN,sputtering,Glass,Thin film,Semiconductor
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