Slightly off-axis interferometry based on spatial-carrier phase-shifting differential method

Optics & Laser Technology(2023)

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摘要
•A spatial-carrier phase-shifting differential method is proposed.•Two interferograms are removed background via filtering and differential operation.•Phase related parameters are solved using Lissajous ellipse fitting.•The method sacrifices less space bandwidth product than traditional off-axis method.•The method has better performance in resisting noise and different phase heights.
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关键词
Slightly off-axis interferometry,Spatial-carrier phase-shifting,Differential operation
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