Synthesis of a PCST-containing acrylic polymers and its application in negative-tone photoresist

Jintong Li,Tianzhao Wu,Jinshun Zhao,Huimin Xue

Materials Letters（2023）

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摘要

•A novel acrylate-based negative-tone chemically amplified resists (CARs) is prepared.•The resin shows good thermal stability and film-forming performance with introduction of PCST.•The photoresists exhibit an outstanding pattern transfer ability.•The photoresists present negative development characteristics in DUV and EBL.

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关键词

Methyl methacrylate, Electron beam lithography, CARs, P-chlorostyrene

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