A novel hollow-type XY piezoelectric positioning platform
International Journal of Mechanical Sciences(2023)
摘要
•A hollow-type XY piezoelectric positioning platform with three-stage flexible lever amplification is proposed.•This platform enhanced space utilization, output performance for compact, and high-performance applications.•The three-stage flexible lever amplification structure increases the output displacement of the piezoelectric stack.•The leaf-shaped flexible beams can efficiently suppress mutual coupling motion, leading to high precision positioning.•The platform's versatility and effectiveness were confirmed in optical microscopy of minute electronic components.
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关键词
hollow-type
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