Modeling of SrTiO3 polycrystalline substrate grain growth for tuning thin film functional properties

Applied Materials Today(2023)

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摘要
•Study of the granular growth of SrTiO3.•Control of grain size in combinatorial substrate epitaxy (CSE) approach.•Modeling polycrystalline SrTiO3 substrates sintering.•Introduction in a controlled way grain boundaries in thin films.
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关键词
polycrystalline substrate grain growth,thin film
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