Modeling of SrTiO3 polycrystalline substrate grain growth for tuning thin film functional properties
Applied Materials Today(2023)
摘要
•Study of the granular growth of SrTiO3.•Control of grain size in combinatorial substrate epitaxy (CSE) approach.•Modeling polycrystalline SrTiO3 substrates sintering.•Introduction in a controlled way grain boundaries in thin films.
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关键词
polycrystalline substrate grain growth,thin film
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