General optimization of breakdown voltage and resistivity on power components in terms of doping level and thickness

DIAMOND AND RELATED MATERIALS(2023)

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摘要
The emergence of wide band-gap (WBG) materials promises improved performance in semiconductor devices, but also presents significant technical challenges. Developing this immature technology and adapting market-ready silicon-based technology to new materials requires a thorough understanding of the relationship between material properties and the final electrical performance of the component. In this work, we propose a model that relates generic material properties and device-specific parameters (such as doping level or thickness) to the final breakdown voltage and performance of unipolar vertical diodes. Our approach enables optimized device design and evaluation by connecting the electrical performance target with the optimal drift layer characteristics. This model can be applied universally to any material with known impact ionization coefficients, carrier mobility, and thermal activation energy. We focus on diamond as a paradigm for WBG materials, illustrating specific characteristics such as incomplete carrier ionization or elevated doping-dependent critical electric fields. Our model predicts that diamond-based vertical devices with 70 μm layers and doping levels of 1.1015 cm−3 can sustain 20 kV.
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关键词
Growth optimisation,Power electronic performance
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