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Comparative study on infrared properties of PLD-grown DLC film and SiC film

Yimin Lu,Hai Wang,Chaowei Mi,Chunlai Yang,Guojun Huang,Manman Xu

Infrared Physics & Technology（2023）

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Abstract
•DLC and SiC films were grown by KrF laser with different fluences.•Comparison in infrared properties of the DLC and SiC films was carried out.•Sandwich DLC/SiC/DLC coating was designed to improve adhesive property.
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Key words
Infrared transmission spectrum, Pulsed laser deposition, Diamond -like carbon film, Silicon carbide film, Optical constant, Critical load
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