CeO2-Doped Hf0.5Zr0.5O2 Ferroelectrics for High Endurance Embedded Memory Applications

Z. Yu, B. Saini,P. J. Liao, Y. K. Chang, V. Hou, C. H. Nien, Y. C. Shih, S. H. Yeong, V. Afanas'Ev, F. Huang, J. D. Baniecki, A. Mehta,C. S. Chang, H.-S. P. Wong, W. Tsai, P. C. McIntyre

2022 International Symposium on VLSI Technology, Systems and Applications (VLSI-TSA)(2022)

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