Тонкопленочные Al-мишени для лазерно-плазменного источника экстремального ультрафиолетового излучения

С.А. Гарахин,А.Я. Лопатин,А.Н. Нечай,А.А. Перекалов,А.Е. Пестов,Н.Н. Салащенко,Н.Н. Цыбин,Н.И. Чхало

Журнал технической физики（2022）

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摘要

Using a multilayer mirror spectrometer of the extreme ultraviolet (EUV) range, the laser plasma emission spectra of bulk aluminum in the wavelength range of 8.0-18.0 nm were studied. Testing of thin film laser targets made of aluminum and comparative measurements of the intensity of EUV radiation of a film with a thickness of 100 nm and a bulk material target were carried out.

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