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真空氦漏孔校准方法的研究

Liu Beibei,Jiang Houyong,Liu Yi,Zhou Yuren

China Instrumentation（2023）

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Abstract
本文介绍了一种不带氦气源的真空氦漏孔的校准方法,可实现-100～1000kPa压力、(10-10～10-4)Pa.m3/s漏率范围内的真空氦漏孔的校准,扩展不确定度Urel=10％(k=2).适用于真空氦漏孔日常的校准工作.
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