Epitaxial α-Ta (110) film on a-plane sapphire substrate for superconducting qubits on wafer scale
Japanese Journal of Applied Physics(2023)
Abstract
Realization of practical superconducting quantum computing requires many
qubits of long coherence time. Compared to the commonly used Ta deposited on
c-plane sapphire, which occasionally form α-Ta (111) grains and
e̱ṯa̱-tantalum grains, high quality Ta (110) film can grow epitaxial on
a-plane sapphire because of the atomic relationships at the interface.
Well-ordered α-Ta (110) film on wafer-scale a-plane sapphire has been
prepared. The film exhibits high residual resistance ratio. Transmon qubits
fabricated using these film shows relaxation times exceeding 150 μs. The
results suggest Ta film on a-plane sapphire is a promising choice for long
coherence time qubit on wafer scale.
MoreTranslated text
Key words
qubits,a-plane
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