Correction: Composition control of conformal crystalline GeSbTe films by atomic layer deposition supercycles and tellurization annealing

Yewon Kim, Kwonyoung Kim, Okhyeon Kim,Chang Yup Park,Dong Geon Koo,Dong-Ho Ahn,Bong Jin Kuh,Won-Jun Lee

Journal of Materials Chemistry C（2022）

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摘要

Correction for ‘Composition control of conformal crystalline GeSbTe films by atomic layer deposition supercycles and tellurization annealing’ by Yewon Kim et al., J. Mater. Chem. C, 2022, 10, 9691–9698, DOI: https://doi.org/10.1039/D2TC00784C.

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