Proposal for a complete 3D surface reconstruction using images from a scanning electron microscope (SEM)

Mayra Yucely Beb,Sounkalo Dembélé, Akkiz Bekel, Isabelle Jouffroy-Bapicot, Sébastien Thibaud,Nadine Piat,Olivier Lehmann, Jean-Yves Rauch,Patrick Rougeot, Louis-Marie Lebas,Cyril Langlois,Lucian Roiban,Clémentine Fellah, Gilles Cuny,Karine Masenelli-Varlot

Frontiers in Optics + Laser Science 2022 (FIO, LS)(2022)

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摘要
A three-dimensional model enables the development of accurate solutions to have more information about the thickness, texture, and characteristics of small-size samples for education and metrology applications. This project proposes an idea to obtain a complete 3D surface reconstruction using the application of Pollen 3D for the scanning electron microscope (SEM) images with high magnification. The main objective is to have a set of images of the complete 360° rotation of the sample with a robot inside the chamber of the SEM. Simulation SEM images with Blender (open source application) are proposed for results validation.
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