Research on the dynamic tracking error compensation method of the linear axis of an ultra-precision lathe based on a piezo nanopositioning stage

Abstract Single-point diamond turning technology has been widely used in processing microstructures. The accuracy of ultraprecision cutting machine tools affects the performance of the microstructure. By improving the structure of the machine tool itself, the machining accuracy of ultraprecision diamond lathes has almost become optimized. Therefore, this research identifies and analyzes the linear axis tracking error through the dynamic modeling of a macro/micro cutting system. Furthermore, the impact of the tracking error on machining accuracy is obtained. Based on the macro/micro cutting system, a servo tracking error compensation method is proposed, and the effectiveness of this error compensation strategy is verified by simulation. The proposed experimental approach includes cutting experiments of tracking error compensation for a hyperbolic sine wave surface structure, verifying the surface profile accuracy of the workpiece with and without tracking error compensation. Additionally, this study proposes a profile evaluation method for microstructure. Experimental results show that the proposed tracking error compensation strategy effectively reduces the tracking error of ultraprecision cutting machine tools. Additionally, the proposed approach significantly improves the microstructure machining profile accuracy and can be used for ultraprecision lathes with high precision.