2D MEMS Vector Scanning Mirrors for LIDAR, Medical Imaging, and High Laser Power ApplicationsThilo Sandner, Benjamin Mustin,Klemens Birnbaum,Martin Blasl,Thomas Graßhoff,Markus Schwarzenberg,Jan GrahmannMOEMS and Miniaturized Systems XXII(2023)引用 1|浏览6AI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要