Improving STEM scale calibration reliability with scanning noise correction and image registration

Abstract In conventional scanning transmission electron microscopy (STEM) calibration, an image of a known specimen is taken and, the length is determined based on the known spacing appearing in the image. However, in high-magnification images, the accuracy of scale calibration decreases as the effect of scanning noise, which can be caused by the vibration of equipment, the instability of AC power and temperature, etc., increases. In this report, we introduce a calibration method for STEM, including scanning noise correction and image registration using a Si single-crystal image. The validity of the calibration method was confirmed by verifying the lattice parameter of an example sample of Cu3Al. The validation results show that the calibration can be more reliable by reducing the influence of scanning noise, allowing the lattice parameters to be accurately measured with a relative error of less than 3%.