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(Invited) Addressing Key Process and Material Challenges to Enable 2D Transition Metal Dichalcogenide Channels in Advanced Logic Devices

Pierre Morin,Benjamin Groven,Henry Medina,Yuanyuan Shi,Vladislav Voronenkov, Iryna Kandybka,Annelies Delabie, Dries Vranckx, Brecht De Vos, Sebastiaan Nijs,Thibaut Maurice,Daire Cott,Sreetama Banerjee,Quentin Smets,Tom Schram,Xiangyu Wu,Dennis Lin,Inge Asselberghs

ECS Meeting Abstracts（2022）

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