Using compact model to verify IGZO RO performance for engineering application

Yu Yong, Jing Liang, Nan Yang,De-Yuan Xiao, Jian-Peng Jiang,Jing-Rui Guo,Ling-Fei Wang,Di Geng,Lan-Song Ba,Hong-Gang Liang, Ya-Nan Lu, Dan Wang, Yu-Ke Li, Xiao-Ming Yin, Long Huang,Jiang-Liu Shi,Gui-Lei Wang,Yan-Zhe Tang,Hong-Wen Li, Bryan Kang,Abraham Yoo,Kan-Yu Cao,Ling Li,Chao Zhao

2022 IEEE 16th International Conference on Solid-State & Integrated Circuit Technology (ICSICT)(2022)

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摘要
Since IGZO was invented by Kimizuka from 1985, 2D and 3D front and back gate IGZO transistors had been used. As integrated circuit becomes more complex, the device and SPICE models play the key role between manufacturing and circuit designer, one of the most advanced surface-potential based compact model of IGZO is introduced and verified from process variation and ring oscillator circuit performance in this paper for the engineering application in the future.
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关键词
igzo ro performance,compact model
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