Block Copolymer-assisted Carbon Nanotube Gas Sensor on SOI Substrate

This paper demonstrates the fabrication of sensor with electrical and gas sensing characteristics formed by block copolymer (BCP)-assisted carbon nanotube (CNT) on a silicon-on-insulator (SOI). The maximum sensing current of the sensor device is 19.02 μA when V DS is at the optimal voltage of 30 V. Meanwhile, the gas sensor exhibits good gas sensing performance both in oxidizing gas NO 2 and reducing gas NH 3 , and high stability. In addition, the Schottky characteristic appeared when the back gate-voltage regulation is applied. The gas sensor of BCP-assisted CNT network not only successfully forms the controllable sensing film but also realizes effective utilization of the sensing area of CNTs during the device fabrication and characterization process.