Block Copolymer-assisted Carbon Nanotube Gas Sensor on SOI Substrate
2022 IEEE 16th International Conference on Solid-State & Integrated Circuit Technology (ICSICT)(2022)
Abstract
This paper demonstrates the fabrication of sensor with electrical and gas sensing characteristics formed by block copolymer (BCP)-assisted carbon nanotube (CNT) on a silicon-on-insulator (SOI). The maximum sensing current of the sensor device is 19.02 μA when V
DS
is at the optimal voltage of 30 V. Meanwhile, the gas sensor exhibits good gas sensing performance both in oxidizing gas NO
2
and reducing gas NH
3
, and high stability. In addition, the Schottky characteristic appeared when the back gate-voltage regulation is applied. The gas sensor of BCP-assisted CNT network not only successfully forms the controllable sensing film but also realizes effective utilization of the sensing area of CNTs during the device fabrication and characterization process.
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Key words
back gate-voltage regulation,BCP-assisted CNT network,block copolymer-assisted carbon nanotube gas sensor,C-Si/int,controllable sensing film,current 19.02 muA,electrical gas sensing characteristics,NH3/bin,NO2/bin,oxidizing gas,Schottky characteristics,silicon-on-insulator,SOI substrate,VDS,voltage 30.0 V
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