Metal Ion Recognition Sensor Based on Resistive Switching Effect

This paper reports a novel metal ion sensor composed of sandwiched Electrolyte-Oxide-Metal (EOM) structure. The EOM devices exhibit obvious resistive switching characteristics when excited by voltage. We test four electrolytes under different SiO2 thicknesses and different electrolyte concentrations to research the resistive switching characteristics of the devices. The experiments show that the silicon oxide films fabricated by Plasma Enhanced Chemical Vapor Deposition can have relatively uniform turn-on voltage characteristics. In addition, we did more than 3000 tests for each electrolyte at 0.1M concentration and made a data set. A Deep Neural Network is constructed to train this data set, and the recognition accuracy reaches 99.6%. This demonstrates the potential of EOM devices in the field of identifying multiple metal ions.