1-Octadecanethiol Sam on CMOS-MEMS Gold-Plated Resonator Via Dip-Cast for VOCS Sensing
2023 IEEE 36TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, MEMS(2023)
Abstract
We present a novel chemical VOCs sensor based on a CMOS-MEMS gold plated micro-resonator functionalized with a self-assembled monolayer (SAM) of 1- octadecanethiol (ODT) via solution-casting being, in contrast to common techniques, fully compatible with batch production without additional lithographic steps requirement. The device operated at 2-MHz being fully integrated with an on-chip Pierce oscillator circuit for self- sustained operation. The MEMS resonator was fabricated using a commercial 0.35-μm CMOS technology and coated through electroless nickel immersion gold (ENIG) process providing thiol-based extended functionalization compatibility over standard CMOS BEOL aluminum layers. This CMOS-MEMS sensor platform opens several possibilities to multiple functional SAMs-based organic surfaces by synthetizing functionalized thiols and build a sensing matrix for breath pattern recognition, depicting tremendous potential low-cost non-invasive disease diagnosis applications.
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Key words
MEMS resonators,VOCs,CMOS-MEMS,Lab-on-Chip,Self-Assembled Monolayer,Gas sensor,ENIG
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