A Novel Multiple-Folded Beam Disk Resonator for Maximizing the Thermoelastic Quality Factor

This paper reports a micromachined multiple folded-beam disk resonator whose thermoelastic quality factor (Q(TED)) can exceed 2 million owning to the topology improvement and parameters optimization for the (100) silicon resonant structure. The measured total quality factor (Q) reaches 710 k, surpassing the Q of most micromachined disk resonators. Moreover, the conducted temperature experiment indicates that the thermoelastic damping (TED) is no longer the only dominant damping mechanism.