120 ppm Quality Factor Thermal Stability from -40 ℃ to +60℃ of a Dual-Axis MEMS Gyroscope Based on Joule Effect Dynamic Control

This paper presents a novel calibration method to improve the thermal stability of the quality factor of a MEMS gyroscope based on Joule effect dynamic control for the first time to the knowledge of the authors, which adjusts the dissipation energy of a resistive element connected to the mechanical structure with closed loop control by monitoring the driving voltage. The results show that the relative variation of the Q-factor dramatically reduced by more than 30000× down to ~120ppm from -40 ℃ to +60℃ after applying the proposed means to a dual-axis gyroscope, which achieves only 30ppm of driving voltage stability over 100℃ range with 3600× reduction. This technique is promising for enhancing the anti-shock performance and alleviating the bias thermal drift caused by the electrical coupling of the MEMS gyroscopes.