A Time-Series Configuration Method of Mode Reversal in MEMS Gyroscopes Under Different Temperature-Varying Conditions
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)(2023)
摘要
Mode reversal is a real-time online self-calibration method for gyroscopes. This paper reports a timing optimization method of mode reversal in MEMS gyroscopes. It provides guidelines for the timing configuration of mode reversal at different temperature change rates. Working time optimization can reduce the zero-rate output (ZRO) fluctuation of the gyroscope in the process of rapid temperature change, and transition time optimization can reduce the influence of the output when the gyroscope is unstable.
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关键词
MEMS gyroscopes, Mode reversal, Timing configuration
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