Inverse design of a Si-based high-performance vertical-emitting meta-grating coupler on a 220 nm silicon-on-insulator platform

Efficient extraction of light from a high refractive index silicon waveguide out of a chip is difficult to achieve. An inverse design approach was employed using the particle swarm optimization method to attain a vertical emitting meta-grating coupler with high coupling efficiency in a 220-nm-thick silicon-on-insulator platform. By carefully selecting the figure of merit and appropriately defining parameter space, unique L-shape and U-shape grating elements that boosted the out-of-plane radiation of light were obtained. In addition, a 65.7% (-1.82 dB) outcoupling efficiency and a 60.2% (-2.2 dB) fiber-to-chip vertical coupling efficiency with an 88 nm 3 dB bandwidth were demonstrated by numerical simulation. Considering fabrication constraints, the optimized complex meta-grating coupler was modified to correspond to two etching steps and was then fabricated with a complementary metal-oxide-semiconductor-compatible process. The modified meta-grating coupler exhibited a simulated coupling efficiency of 57.5% (-2.4 dB) with a 74 nm 3-dB bandwidth in the C-band and an experimentally measured coupling efficiency of 38% (-4.2 dB).& COPY; 2023 Chinese Laser Press