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On the Technology of a Laterally Coupled Bragg Grating of Single-Mode Distributed Feedback Laser Diodes

Nanobiotechnology Reports(2023)

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Abstract
We report on the successful development and application of the technology of a Bragg diffraction grating for the implementation of a single-mode ridge-type distributed feedback laser. Single-mode 1550-nm laser transmitters with a side-mode suppression ratio of no lower than 50 dB are made in Russia for the first time. The proposed technology makes it possible to form a rigid dielectric mask for etching the laterally coupled grating with a period from 0.19 to 0.25 μm, which corresponds to the wavelength range of 1.3–1.6 μm.
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Key words
electron-beam lithography,etching of semiconductors,Bragg grating,distributed feedback,laser diode
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