Research on nano-scale AlN nucleation layer growth and GaN HEMT characteristics based on MOCVD technology

The AlN nucleation layers of different thicknesses were grown on a 100 mm 4H-SiC substrate in a low-pressure MOCVD. By using in-situ high-temperature etching of the substrate steps, the AlN nucleation layer could achieve layered growth as soon as possible, and finally achieve 11.6 nm. The complete AlN film was prepared, and the surface morphology and interface quality of AlN were analyzed with atomic force microscope and transmission electron microscope. A 1.8 ??m thick GaN HEMT epitaxial material was prepared based on the ultra-thin AlN nucleation layer. The (002) and (102) plane rocking curves of GaN had a FWHM of 138arcsec and 231arcsec, and the electrons mobility of the heterojunction two-dimensional electron gas reached 2200 cm2/V???s. The AlN interface thermal resistance measured by the high-precision 3?? method was reduced to 5.53 ?? 10-9 m2K/W.