Ferroelectric and piezoelectric properties of lead-free Li_0.06(K_0.5Na_0.5)_0.94NbO₃ thin films

Lead-free (K0.5Na0.5)NbO3 (KNN) andLi(0.06)(K0.5Na0.5)(0.94)NbO3 (LKNN) thin films were fabricated by a sol-gel method. The effects of Li substitution on crystal structure, microstructure and electrical properties of KNN film were systematically studied. Li doping can enhance the ferroelectric and piezoelectric properties of KNN film. Compared with pure KNN film, the LKNN film possesses larger remanent polarization (P-r similar to 9.3 mu C/cm(2)) and saturated polarization (P-s similar to 41.2 mu C/cm(2)) and lower leakage current density (similar to 10(-5)A/cm(2) at 200 kV/cm). Meanwhile, a typical butterfly shaped piezoelectric response curve is obtained in the LKNN film with a high piezoelectric coefficient (d(33) similar to 105 pm/V). Excellent fatigue resistance (similar to 10(9) switching cycles) and aging resistance (similar to 180 days) demonstrate the long-term working stability of LKNN film. These findings indicate that KNN-based lead-free piezoelectric films have a broad application prospect in microelectromechanical systems (MEMS).