Homojunction structure amorphous oxide thin film transistors with ultra-high mobility

Amorphous oxide semiconductors(AOS)have unique advantages in transparent and flexible thin film transistors(TFTs)applications,compared to low-temperature polycrystalline-Si(LTPS).However,intrinsic AOS TFTs are difficult to obtain field-effect mobility(μFE)higher than LTPS(100 cm2/(V·s)).Here,we design ZnAlSnO(ZATO)homojunction structure TFTs to ob-tain μFE = 113.8 cm2/(V·s).The device demonstrates optimized comprehensive electrical properties with an off-current of about 1.5×10–11 A,a threshold voltage of –1.71 V,and a subthreshold swing of 0.372 V/dec.There are two kinds of gradient coupled in the homojunction active layer,which are micro-crystallization and carrier suppressor concentration gradient distribution so that the device can reduce off-current and shift the threshold voltage positively while maintaining high field-effect mobility.Our research in the homojunction active layer points to a promising direction for obtaining excellent-performance AOS TFTs.